PHOTO-PATTERNABLE DIELECTRIC MATERIALS AND FORMULATIONS AND METHODS OF USE

摘要

Silsesquioxane polymers, silsesquioxane polymers in negative tone photo-patternable dielectric formulations, methods of forming structures using negative tone photo-patternable dielectric formulations containing silsesquioxane polymers, and structures made from silsesquioxane polymers.

主权项

1. A structure, comprising:
a cross-linked layer of a silsesquioxane polymer or a silsesquioxane polymer on a substrate; a trench in said cross-linked layer; an electrically conductive material filling said trench and contacting said substrate in a bottom of said trench; and a silsesquioxane polymer, wherein said silsesquioxane polymer includes at least one monomer of the structure: where wherein R3 is selected from the group consisting of linear alkyl, branched alkyl and cycloalkyl moieties.