Silicon Condenser Microphone

摘要

A silicon condenser microphone is disclosed. The silicon condenser microphone includes a substrate having a top surface, a lower surface opposed to the top surface, and a recess concave from the top surface toward the lower surface. The recess includes a bottom for carrying a chip thereon. The microphone further includes a transducer spanning the recess. By virtue of this configuration, the size of the microphone is reduced, and acoustic performance of the microphone is accordingly improved.

主权项

1. A silicon condenser microphone, comprising:
a substrate, comprising a top surface, a lower surface opposed to the top surface, and a recess concave from the top surface toward the lower surface, the recess having a bottom; a cover mounted with the substrate for forming a cavity; a chip received in the recess and mounted on the bottom; a transducer unit accommodated in the cavity and spanning the recess; wherein the transducer unit includes a volume communicating with the recess.