发明名称 SEMICONDUCTOR DEVICE
摘要 A transistor with stable electric characteristics is provided. An aluminum oxide film containing boron is formed in order to prevent hydrogen from diffusing into an oxide semiconductor film.
申请公布号 US2015187950(A1) 申请公布日期 2015.07.02
申请号 US201414574904 申请日期 2014.12.18
申请人 Semiconductor Energy Laboratory Co., Ltd. 发明人 Sato Yuichi;Yamade Naoto
分类号 H01L29/786;H01L27/12 主分类号 H01L29/786
代理机构 代理人
主权项 1. A semiconductor device comprising: a first aluminum oxide film over a substrate; a transistor over the first aluminum oxide film, the transistor comprising: a gate electrode;a gate insulating film; andan oxide semiconductor film including a channel formation region, between the gate electrode and the gate insulating film; and a second aluminum oxide film over the transistor, wherein the first aluminum oxide film, the transistor, and the second aluminum oxide film overlap each other, and wherein each of the first aluminum oxide film and the second aluminum oxide film contains boron.
地址 Atsugi-shi JP