发明名称 |
REAL-TIME MONITORING OF FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS |
摘要 |
Techniques include receiving a design of an integrated computational element (ICE) including specification of a substrate and a plurality of layers, their respective target thicknesses and complex refractive indices, complex refractive indices of adjacent layers being different from each other, and a notional ICE fabricated in accordance with the ICE design being related to a characteristic of a sample; forming at least some of the layers of a plurality of ICEs in accordance with the ICE design using a deposition source, where the layers of the ICEs being formed are supported on a support that is periodically moved relative to the deposition source during the forming; monitoring characteristics of the layers of the ICEs during the forming, the monitoring of the characteristics being performed using a timing of the periodic motion of the support relative to the deposition source; and adjusting the forming based on results of the monitoring. |
申请公布号 |
WO2015099709(A1) |
申请公布日期 |
2015.07.02 |
申请号 |
WO2013US77687 |
申请日期 |
2013.12.24 |
申请人 |
HALLIBURTON ENERGY SERVICES, INC. |
发明人 |
PRICE, JAMES M.;NAYAK, ADITYA B.;PERKINS, DAVID L. |
分类号 |
G01N21/17;G01B11/06;G01N21/41 |
主分类号 |
G01N21/17 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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