INTERPOSER SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME

摘要

A method for manufacturing an interposer substrate according to the present invention includes the steps of: aligning a first mask and exposing the substrate to light by using a first exposure dose; aligning a second mask which has a pattern which is different from the pattern of the first mask and exposing the substrate to the light by using a second exposure dose; forming a groove by etching the exposed substrate; and forming a metal wire on the substrate by filling the groove with metal.