THE METHOD FOR CLEANING METAL ENCAPSULATION USING PLASMA

摘要

The present invention relates to a method for cleaning a metallic encapsulation using plasma and, more specifically, to a method for cleaning a metallic encapsulation using plasma which includes: a metallic encapsulation preparation step of supplying the metallic encapsulation manufactured by an electric casting method into a reaction chamber; and a plasma cleaning step of removing organic impurities existing in the reaction chamber by supplying a mixed gas containing oxygen and argon into the reaction chamber and generating plasma. The present invention is capable of cleaning the metallic encapsulation manufactured by the electric casting method using the plasma, thereby efficiently removing organic compounds remaining on the surface of the encapsulation with an economical and eco-friendly method.