FILM DEPOSITION DEVICE

摘要

A film deposition device is disclosed. The device includes a driver, a sputtering target assembly, and at least one rotatable magnetoelectric device located at the back of the sputtering target assembly. The rotatable magnetoelectric device includes a transmission having a conveyor belt, and at least one pair of gears which cooperate with the conveyor belt and are disposed at an inner side of the conveyor belt, where an axial direction of the gears is substantially parallel to a surface of the sputtering target assembly. The rotatable magnetoelectric device also includes a first set of magnets, where the first set of magnets are disposed outside of the conveyor belt. In addition, the driver is configured to cause the gears to rotate.

主权项

1. A film deposition device, comprising:
a driver; a sputtering target assembly; and at least one rotatable magnetoelectric device located at the back of the sputtering target assembly, wherein the rotatable magnetoelectric device comprises:
a transmission, comprising:
a conveyor belt, andat least one pair of gears which cooperate with the conveyor belt and are disposed at an inner side of the conveyor belt, wherein an axial direction of the gears is substantially parallel to a surface of the sputtering target assembly, anda first set of magnets, wherein the first set of magnets are disposed outside of the conveyor belt,wherein the driver is configured to cause the gears to rotate.