High Voltage High Current Vacuum Integrated Circuit

摘要

A high voltage, high current vacuum integrated circuit includes a common vacuum enclosure that includes at least two cold-cathode field emission electron tubes, and contains at least one internal vacuum pumping means, at least one exhaust tubulation, vacuum-sealed electrically-insulated feedthroughs, and internal electrical insulation. The cold-cathode field emission electron tubes are configured to operate at high voltage and high current and interconnected with each other to implement a circuit function.

主权项

1. A high voltage high current vacuum integrated circuit, comprising a common vacuum enclosure containing:
a) at least one internal vacuum pumping means; b) at least one exhaust tubulation for evacuating said vacuum enclosure and subsequently sealing and separating said vacuum enclosure from at least one external vacuum pump; c) vacuum-sealed electrically-insulated feedthroughs passing electrical conductors from outside the vacuum enclosure to inside the enclosure while electrically insulating the electrical conductors from the vacuum enclosure and maintaining the vacuum seal; and d) internal electrical insulation for preventing internal electrical short circuits; and e) at least two cold-cathode field emission electron tubes, said tubes being configured to operate at high voltage and high current and being interconnected with each other to implement a circuit function.