| 摘要 |
This device (2) is formed by arranging multiple passage blocks (3). As a passage forming a main gas passage (9), each passage block (3) has a first inverted-V passage (15), and a first outlet passage (16) which allows communication between the apex of the first inverted-V passage (15) and an outlet (4b) of a first on-off valve (4). As a passage forming a vent gas passage (10), each passage block (3) has a second inverted-V passage (17), and a second outlet passage (18) which allows communication between the apex of the second inverted-V passage (17) and an outlet (5b) of a second on-off valve (5). As a passage forming a first sub-gas inflow passage (11), each passage block (3) has a common inlet passage (20), and a first inlet passage (19) communicating with an inlet (4a) of the first on-off valve (4). As a passage forming a second sub-gas inflow passage (12), each passage block (3) has a second inlet passage (21) communicating with an inlet (5a) of the second on-off valve (5), and a communication path (22) communicating with the common inlet passage (20). |
