| 摘要 |
PROBLEM TO BE SOLVED: To shield visible light and infrared light, minimize thickness of an X-ray window, and consequently acquire an X-ray equal to or less than 1 keV efficiently.SOLUTION: An X-ray analyzer 10 includes: an electron gun 14 which discharges a characteristic X-ray 13 by exciting a sample 11 being an analysis object; a transition end sensor (TES) 15 which detects the characteristic X-ray 13; and an electromagnetic wave shield part 24 and a heat shielding part 19 sequentially arranged from the sample 11 to the TES 15. The electromagnetic wave shielding part 24 is a capillary 25 having a through hole formation part which forms a through hole through which the characteristic X-ray 13 passes. The through hole formation part forms the through hole with the size at least equal to or less than 50 μm. The heat shielding part 19 includes a first X-ray window 22 and a second X-ray window 23 for transmitting the characteristic X-ray 13, and the sizes of the first X-ray window 22 and the second X-ray window 23 are made equal to or smaller than the size of the capillary 25. |
