| 摘要 |
<p>PROBLEM TO BE SOLVED: To inspect an inspection target while removing foreign matters.SOLUTION: An inspection apparatus includes: a table section mounting thereon a flat inspection target; a microscope section 6 that includes an objective 6b observing the inspection target with a predetermined magnification, and an imaging unit 6c imaging the inspection target observed via the objective 6b; a frame 10 supporting the microscope section and slidable in a direction parallel to one side of the table section; and an attraction unit 22a which is arranged close to the front side of the objective 6b while sliding the frame 10, attracting a foreign matter adhering onto a surface of the inspection target when the imaging unit 6c images the inspection target.</p> |
