| 摘要 |
The present invention relates to an MEMS sound transducer and to a chip embodied therewith for generating and/or detecting sound waves in the audible wavelength spectrum, comprising a carrier substrate (2), a cavity (3) formed in the carrier substrate (2) and having at least one opening (4), and a multilayered piezoelectric membrane structure (5), which spans the opening (4) of the cavity (3) and is connected to the carrier substrate (2) in the edge region of said structure, such that said structure can oscillate relative to the carrier substrate (2) for the purpose of generating and/or detecting sound energy, wherein the membrane structure (5) at least regionally in cross section comprises a first piezolayer (8) and a second piezolayer (9) arranged at a distance therefrom. According to the invention, an interlayer (19) is arranged in the region between the two piezolayers (8, 9), said interlayer being designed in such a way that sound energy is reflectable by means of said interlayer in the direction of at least one air-adjoining interface (17, 18) of the membrane structure (5). |
