AUTOMATIC MATCHING CIRCUIT FOR HIGH-FREQUENCY POWER SUPPLY

摘要

This automatic matching circuit is provided with the following: a variable inductor for performing high-frequency impedance matching between the output impedance of a high-frequency power supply (10) and the input impedance of a resonant transmission antenna (11) at a frequency of 2 MHz or higher, the inductance of which can be varied by an electronic component whereby contact switching, including continuous contact switching, is performed electrically; variable capacitors for performing impedance matching, the capacitance of which can be varied by an electronic component whereby contact switching, including continuous contact switching, is performed electrically; and a variability control circuit (1) that controls the electronic components whereby contact switching for the variable inductor and the variable capacitors, including continuous contact switching, is performed electrically so as to perform impedance matching.