| 摘要 |
<p>Disclosed is an apparatus for transferring an element of a semiconductor element test handler comprising: a transferring module including an upper frame combined to be moved in a longitudinal direction with a guide rail prepared inside semiconductor inspection equipment, and a lower frame combined to be lifted in a Z-axis direction in the lower part of the upper frame; a fixing block fixed and combined with the lower frame of the transferring module, horizontally arranged on an outer surface, and having a plurality of guide rails with mutual regular intervals; a moving block arranged to correspond to the fixing block, combined to be moved in a Y-axis direction with the lower frame, horizontally arranged in an outer surface, and having a plurality of X-axis guide rails with mutual regular intervals; a plurality of picker blocks combined to correspond to the fixing block and the moving block, moved along the X-axis guide rail, and prepared to vacuum adsorb a semiconductor element; and a pair of lifting plates combined with the lower frame to be arranged outside the picker block, to adjust an interval between the picker blocks by moving the picker block along the X-axis guide rail, and prepared to be lifted in a Z-axis direction with respect to the lower frame.</p> |
