MAGNETIC FLUID BEARING DEVICE AND VACUUM CHAMBER

摘要

PROBLEM TO BE SOLVED: To provide a vacuum chamber and a magnetic fluid bearing device capable of accepting a load in a superior manner even if a radial load accompanied with a deflection angle is applied under a relative spherical surface motion between an inner member and an outer member and capable of holding a clearance between each of the members.SOLUTION: The present invention relates to a magnetic fluid bearing device comprising an inner member 1 and an outer member 2 that is rotatably applied over the inner member 1 with their axial directions being aligned to each other. A plurality of rollers 5 are arranged between a spherical convex outer peripheral surface 3 of the inner member 1 and an inner peripheral surface 4 of the outer member 2 of spherical concave surface opposing against the spherical convex surface, the inner member 1 and the outer member 2 are constituted in such a manner that they can perform a relative spherical surface motion along the spherical convex surface and the spherical concave surface and there is provided a magnetic fluid seal for sealing a curved clearance curved to protrude outward and formed between the inner member 1 and the outer member 2.