发明名称 SEALING SHEET PROVIDED WITH DOUBLE-SIDED SEPARATOR, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 A sealing sheet with a double-sided separator, provided with a sealing sheet, a separator (A) laminated on one side of the sealing sheet, and a separator (B) laminated on the other side of the sealing sheet, the separation force F1 between the sealing sheet and the separator (A), the separation force F2 between the sealing sheet and the separator (B), the thickness t of the sealing sheet, and the area A of the sealing sheet satisfying a specific relationship.
申请公布号 WO2015098851(A1) 申请公布日期 2015.07.02
申请号 WO2014JP83928 申请日期 2014.12.22
申请人 NITTO DENKO CORPORATION 发明人 IINO,CHIE;ISHIZAKA,TSUYOSHI;MORITA,KOSUKE;SHIGA,GOJI
分类号 H01L21/56;H01L21/60;H01L23/14;H01L23/32;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L21/56
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