制造多晶矽的装置;APPARATUS FOR MANUFACTURING POLYSILICON

摘要

提供一种使用化学气相沉积而用于制造多晶矽的装置。用于制造多晶矽的装置包括：包括基底和反应器盖的反应室；经由绝缘元件穿过基底而设置并与电源连接的至少一对电极；与电极对经由电极夹盘耦合且上端相互连接的至少一对极丝；以及盖组件，其包括位在基底上围绕电极对中各自的一侧和上表面的电极盖，与覆盖电极盖上表面的遮盖。; at least a pair of electrodes installed through the substrate by an insulating member and connected with a power supply; at least a pair of filaments which are coupled with the pair of electrodes by an electrode chuck and of which upper ends are connected to each other; and a cover assembly including an electrode cover surrounding an upper surface and a side of each of the pair of electrodes on the substrate and a cover shield covering the upper surface of the electrode cover.