| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a holding tool for a workpiece having a function for assisting the detection of a light waveguide when the waveguide is detected by radiating illumination light. <P>SOLUTION: The holding tool for the workpiece is detachably mounted on a chuck table of a machining device which includes the chuck table for holding the workpiece and a machining means for machining the workpiece held on the chuck table, and mounts and holds the workpiece on the upper surface thereof by sucking. The holding tool for the workpiece includes a mirror-processed upper surface, a suction groove formed on the upper surface, and a through-suction passage whose one end communicating with the suction groove and the other end penetrating the bottom surface side thereof. The holding tool is mounted on the chuck table of the machining device, holds the transparent workpiece by sucking by applying negative pressure from the chuck table via the through suction passage and the suction groove, and radiated illumination light from the upper part of the workpiece which is held by sucking so that the workpiece is uniformly illuminated from the bottom surface side thereof by the reflection light which transmits the workpiece and reflected by the mirror surface of the holding tool. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
