| 摘要 |
<p>The invention relates to a diaphragm type fluid control valve. A lower surface of an inner peripheral part of an annular-shaped flat plate part (32d) of an upper surface side pressure chamber dividing part (32A) can be used as an upper position-restricted part (51). A circular-shaped groove (52) is disposed in an outer periphery of the upper position-restricted part (51) of the annular-shaped flat plate part (32d). an inner periphery (35c) of the diaphragm (35) abuts against the upper position-restricted part (51) in a clamped manner, then the valve can be disposed in a first mountain part (M1) on an innermost side of the ripple part (35b), and no large deformation can be generated. The change of the pressure differential between the upper surface side pressure corresponding to the lift amount and the lower surface side pressure can be changed a lot, and the unexpected deformation and damage of the diaphragm can not be generated, therefore the durability and the reliability can be improved.</p> |
