发明名称 電子部品の洗浄装置および洗浄方法
摘要 <p>A plurality of spray units spray a cleaning liquid to a plurality of spray-target regions between which a site to be cleaned is interposed. The plurality of spray-target regions are linearly extending. The plurality of spray-target regions each has a spray pattern characterized in that a spray direction when viewed from a direction where the plurality of spray-target regions are linearly extending is perpendicular to a plane including the spray-target region. The spray units are disposed such that the plurality of spray-target regions are arranged in juxtaposition each other. The cleaning liquid sprayed from the spray units crashes against the plurality of spray-target regions and thereby generates cleaning liquid flows headed for the site to cleaned.</p>
申请公布号 JP5742721(B2) 申请公布日期 2015.07.01
申请号 JP20110539266 申请日期 2010.10.21
申请人 发明人
分类号 B08B3/02 主分类号 B08B3/02
代理机构 代理人
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