INSPECTION DEVICE AND INSPECTION DEVICE SYSTEM

摘要

The present invention relates to an inspection device and an inspection device system. A first output value evaluating unit (13) acquires an average value of output values of an optical image of a sample (1) for each unit area, and generates a distribution of the average value in an inspection area. A first defect history managing unit (16) generates and maintains a pattern-shaped distribution from distribution of the average value. A second output value evaluating unit (14) acquires at least one of non-uniformity and a variation value of an output value of each pixel in a unit area. A defect determining unit (15) determines whether there is a defect by comparing the acquired value with a threshold value. A second defect history managing unit (17) maintains information of the output value determined as a defect in the defect determining unit (15). A defect and defect history interpreting unit (18) manages and interprets information from the first detect history managing unit (16) and the second defect history managing unit (17).