发明名称 STICK MASK AND THIN FILM FORMING APPARATUS INCLUDING THE SAME
摘要 <p>The present invention provides a stick mask and a thin film forming apparatus having the same to prevent a deposition material from being accumulated between the stick masks, and between a stick mask and a gap blocking plate, comprising: a chamber having a processing space; a deposition mask having a plurality of stick masks wherein each coupling surface is vertically overlapped to be arranged; a support frame supporting the deposition mask; and a deposition module passing through a passing unit of the deposition mask to discharge a deposition material deposited on a target substrate. The stick masks comprises: a blocking unit of the deposition mask blocking a deposition material as each surface of the stick mask is mutually connected to be a flat surface; and an opposition unit of the deposition mask opposite to the target substrate as each of the other surfaces of the stick mask is mutually connected to be a flat surface in parallel with the blocking surface.</p>
申请公布号 KR20150073624(A) 申请公布日期 2015.07.01
申请号 KR20130161549 申请日期 2013.12.23
申请人 LG DISPLAY CO., LTD. 发明人 LEE, YUN MI
分类号 C23C14/04 主分类号 C23C14/04
代理机构 代理人
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