| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a reliable X-ray tube device capable of improving cooling characteristics of an anode target. <P>SOLUTION: An X-ray tube device includes: an X-ray tube 1 having a cathode, an anode target, a vacuum envelope, and a heat transfer face 1s to which heat generated by collision of electrons against the anode target is transferred; a circulation passage 10; a circulation pump 20; a bellows mechanism; and a pressure regulation mechanism 60. The bellows mechanism includes a bellows 32 that divides the bellows mechanism into a cooling liquid-filled space 33 and a gas-filled space 34, absorbs volumetric change due to change in temperature of the aqueous cooling liquid 3, and can expand and contract. The pressure regulation mechanism 60 communicates with the gas-filled space 34 of the bellows mechanism and can regulate gas pressure in the gas-filled space. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
