| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for forming a transparent conductive film for a solar cell by which a transparent conductive film having low resistance, high permeability, and an appropriate surface asperity is obtained at low temperatures and with a few processes, and to provide the transparent conductive film formed by the method, and a forming apparatus for forming the transparent conductive film. <P>SOLUTION: In the method, the transparent conductive film is formed on the surface of a substrate 7 by a sputtering method in one vacuum chamber 1, wherein the film is formed on the surface of the substrate 7 while irradiation of laser beams L through a diffusion plate 16 is performed. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
