热处理炉及热处理方法;HEAT TREATMENT FURNACE AND METHOD FOR HEAT TREATMENT

摘要

本发明系获致一种热处理炉，其系在不使加工成本增大之情形下，且在不会使品质劣化之情形下，可提升制程管内之温度均匀性者。;该热处理炉系具备：管终端部侧加温构件用加热器9及门扉侧加温构件用加热器11，系以包围制程管1之外周的方式设置；管终端部侧加温构件8，系设置在制程管1内之管终端部13与基板设置皿5之间，且吸收管终端部侧加温构件用加热器9所发出之热，并将所吸收之热传热至材料气体12；以及门扉侧加温构件10，系设置在门扉4与基板设置皿5之间，且吸收门扉侧加温构件用加热器11所发出之热，并将所吸收之热传热至材料气体12，门扉侧加温构件10系呈将复数个板状构件配置成放射状之形状，且使复数个板状构件之各者沿着制程管1之轴方向设置在制程管1内。;The heat treatment furnace comprises: a heater 9 for a tube-terminal end heating member and a heater 11 for a door end heating member, wherein they are provided in a manner of surrounding an outer-circumference of a process tube 1; a tube-terminal end heating member 8 provided between a tube terminal 13 and a wafer fixing boat 5 within the process tube 1 for absorbing the heat generated by the heater 9 for a tube-terminal end heating member and transmitting the absorbed heat to a material gas 12; and a door end heating member 10 provided between a door 4 and the wafer fixing boat 5 for absorbing the heat generated by the heater 11 for a door end heating member and transmitting the absorbed heat to the material gas 12, wherein a plurality of plate-shape members are arranged in a radial shape, such that each of the plurality of plate-shape members is arranged in the process tube 1 along an axis direction of the process tube 1.