| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a reflective mask blank with a light-shielding frame having a high level of light-shielding power, and its manufacturing method, and a reflective mask and its manufacturing method. <P>SOLUTION: The reflective mask blank of the present invention comprises: a substrate 11; a multilayered reflective layer 21 formed on a surface of the substrate; and an absorber layer 51 formed on the multilayered reflective layer 21. The method for manufacturing a reflective mask comprises the step of providing a fine rugged pattern on the substrate 11 before the manufacture of the mask blank. Thus, the intensity of reflection caused by the multilayered reflective layer 21 is reduced by a phase effect in use as a reflective mask, and a light-shielding frame having a high level of light-shielding power can be fabricated. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
