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发明名称
感放射线性组成物及图案制造方法
摘要
本发明提供一种感放射线性组成物及使用该感放射线性组成物之图案制造方法,该感放射线性组成物之感度、保存安定性、涂布性、显影性及安全性优异,且藉由曝光及显影便能够形成经抑制异物产生之图案。;本发明之感放射线性组成物,其含有下述通式(1)所示的化合物。式中,R 1 表示氢原子或羟基,R 2 及R 3 独立地表示氢原子或C1~C3的烷基,R 4 及R 5 独立地表示C1~C3的烷基。
申请公布号
TW201524943
申请公布日期
2015.07.01
申请号
TW103133250
申请日期
2014.09.25
申请人
东京应化工业股份有限公司 TOKYO OHKA KOGYO CO., LTD.
发明人
信太胜 SHIDA, MASARU;植松照博 UEMATSU, TERUHIRO
分类号
C07C233/05(2006.01);G03F7/004(2006.01);H01L21/027(2006.01)
主分类号
C07C233/05(2006.01)
代理机构
代理人
蔡坤财李世章
主权项
地址
日本 JP
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