| 摘要 |
An atmospheric environment measuring apparatus including a filter disposed in a casing and adsorbing a component of a gas to be detected; a first mass sensor disposed in the casing between an inlet of the casing and the filter, including a first piezoelectric vibration element and changing a resonance frequency according to a mass of a substance adhered on a surface of the first piezoelectric vibration element; a second mass sensor disposed in a stage following the filter in the casing, including a second piezoelectric vibration element and changing a resonance frequency according to a mass of a substance adhered on a surface of the second piezoelectric vibration element; and a fan disposed in a stage following the second mass sensor in the casing and fluidizing atmosphere from the inlet toward an outlet of the casing. |
