| 摘要 |
<p>A seed crystal (11) having a frontside surface and a backside surface is prepared. Surface roughness of the backside surface of the seed crystal (11) is increased. A coating film including carbon is formed on the backside surface of the seed crystal (11). The coating film and a pedestal (41) are brought into contact with each other with an adhesive interposed therebetween. The adhesive is cured to fix the seed crystal (11) to the pedestal (41). A single crystal (52) is grown on the seed crystal (11). Before the growth is performed, a carbon film (22) is formed by carbonizing the coating film.</p> |
