发明名称 SLIT NOZZLE AND SUBSTRATE COATER USING SAME
摘要 <p>The present invention relates to a slit nozzle for a substrate coater apparatus and a substrate coater apparatus with the same. In the present invention, provided are a substrate coater, including a slit nozzle which coats surfaces of substrate to be treated or substrates with liquid medicine wherein the slit nozzle has a first body and a second body which are touched with each other, a liquid medicine path is formed in a gap between the first body and the second body, and a side plate which opens and closes both side ends of the first body and the second body wherein the side plate has a slit nozzle made through hydrophobic treatment on the surface touching the liquid medicine path, thereby preventing liquid medicine from flowing and hardening on the outside of the a discharging hole of the slit nozzle when the liquid medicine flows on the surface of the side plate forming side boundaries of the liquid medicine path while coating predetermined areas on the substrate with the liquid medicine, and a slit nozzle used in the substrate coater apparatus.</p>
申请公布号 KR20150073352(A) 申请公布日期 2015.07.01
申请号 KR20130160952 申请日期 2013.12.23
申请人 K.C.TECH CO., LTD. 发明人 MOON, JE SEOK;LEE, JONG SIK
分类号 G03F7/16;C03C17/00 主分类号 G03F7/16
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