| 摘要 |
<p>Disclosed is a system to transfer a substrate. According to an embodiment of the present invention, the system to transfer the substrate comprises: a substrate pick up/down device whose one area is arranged on an upper area inside a vacuum chamber to pick up/down a substrate; and a substrate turn device whose part to turn the substrate is arranged on a lower area of the substrate pick up/down device inside the vacuum chamber to interact with the substrate pick up/down device in order for logistics to be operated even if the substrate comes from any direction, and the remaining parts are arranged outside the vacuum chamber.</p> |
