PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE, INK-JET HEAD, AND INK-JET PRINTER

摘要

A piezoelectric element (10) configured by depositing a lower electrode (3), a seed layer (4), and a piezoelectric material layer (5) in this order on a substrate (1), the seed layer (4) being for controlling the crystal orientation of the piezoelectric material layer (5). The seed layer (4) has been configured by depositing two or more layers that each comprise spherical crystal particles (4a).