发明名称 低分子量レジスト用共重合体の製造方法
摘要 A method for producing a resist copolymer having a weight-average molecular weight of not less than 3000 and not more than 6000, in which copolymer the contents of an oligomer having a molecular weight of not more than 1000 and a byproduct derived from a polymerization initiator are small, is provided. The method for producing a resist copolymer comprises the step of continuously supplying a solution containing a monomer and a solution containing a polymerization initiator to a heated solvent to carry out a radical polymerization, wherein the variation range of the concentration of the polymerization initiator in polymerization solution is within ±25% of the median value between the maximum concentration and the minimum concentration during specific time; and the variation range of the concentration of unreacted monomer in the polymerization solution is within ±35% of the median value between the maximum concentration and the minimum concentration during specific time.
申请公布号 JP5743858(B2) 申请公布日期 2015.07.01
申请号 JP20110249049 申请日期 2011.11.14
申请人 丸善石油化学株式会社 发明人 及 川 知
分类号 C08F2/06;C08F4/04;G03F7/038 主分类号 C08F2/06
代理机构 代理人
主权项
地址