| 摘要 |
[Problem] To provide a system and a method for objectively evaluating plasma by easily measuring a current generated by a plasma treatment equipment for medical purposes, etc., and a current flowing through a living body, etc. [Solution] A plasma evaluation system and method for evaluating plasma, including: a treatment target material; and a weak current measurement unit including a resistor unit and a differential amplifier, wherein the treatment target material is connected to the weak current measurement unit via a treatment target side measurement terminal, the resistor unit of the weak current measurement unit is connected to a ground side of a plasma generation current source, and the system and method evaluate plasma by receiving plasma generated by a plasma treatment equipment with the treatment target material, measuring a current by measuring a voltage across resistors of the resistor unit through the differential amplifier, and measuring an output voltage of the plasma generation power source. |
