| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To easily produce an electromechanical conversion element in a target shape and with excellent piezoelectric properties. <P>SOLUTION: A coating film 17B of a PZT precursor solution is formed on a first electrode 12 to become a dry film 15, after which the heat equal to or more than a thermal decomposition temperature is applied only on specific regions of the dry film 15 selectively. Next, amorphous regions 15A which are the heat-decomposed regions of the dry film 15 are left, and the regions excluding the amorphous regions 15A are removed by wet etching. Then the surface of the first electrode 12 is modified so as to be liquid-repellent (a fifth step), and droplets 17A of the PZT precursor solution are discharged so as to form the coating film 17B of the PZT precursor solution selectively on a PZT thin film 17 which is lyophilic region 24A (a sixth step). Moreover, the coating film 17B is dried and decomposed by heating (a seventh step). Then a ninth step is performed after the above-mentioned fifth, sixth and seventh steps are repeated (an eighth step) so that an electromechanical conversion film 14 with a desired thickness is produced. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
