| 摘要 |
<p>A first polishing agent contains: cerium oxide particles; and water, wherein, in IR spectrum of the cerium oxide particle, a value A found by a formula below from a ratio (I/I') between a value I of an absorbance of 3566 cm -1 and a value I' of an absorbance of 3695 cm -1 , and a crystallite diameter XS, is 0.08 or less. A = I / I¹ / XS A second polishing agent contains: cerium oxide particles; and water, wherein, in the cerium oxide particle, a deviation B of a lattice constant found by a formula below from a theoretical lattice constant (a') and a lattice constant (a) measured by powder X-ray diffraction, is -0.16% or more. B % = 1 - a / a¹ €‰ × 100</p> |
