| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable simulation of optical performance by shortening calculation time without substantially degrading the calculation precision. <P>SOLUTION: A simulation method for optical performance of an optical system containing an illumination optical system for illuminating a pattern 44 of a reticle R1 with light from a lighting pupil surface sets a three-dimensional structure of the pattern 44, arranges plural point light sources which are two-dimensionally distributed on the lighting pupil surface, calculates complex amplitude distributions IN1R, IN1I after light from each of the plural point light sources passes through the illuminating optical system and the pattern 44 of the three-dimensional structure thereof, and creates a data base in which the calculated complex amplitude distributions are recorded in association with the plural point light sources. <P>COPYRIGHT: (C)2013,JPO&INPIT |
