发明名称 DIODE STRUCTURE COMPATIBLE WITH FINFET PROCESS
摘要 The present invention relates to an embodiment integrated circuit (e.g., diode) and a method of making the same. The embodiment integrated circuit includes: a well having a first doping type, formed on the upper side of a substrate having the first doping type, and including a fin; a source formed on the upper side of the well on a first side of the fin, and having a second doping type; a drain formed on the upper side of the well on a second side of the fin, and having the first doping type; and a gate oxide formed on the upper side of the fin, and laterally spaced apart from the source by a back-off region of the fin. The integrated circuit is compatible with a FinFET fabrication process.
申请公布号 KR20150073914(A) 申请公布日期 2015.07.01
申请号 KR20150082797 申请日期 2015.06.11
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 TSAI TSUNG CHE;CHANG YI FENG;LEE JAM WEM
分类号 H01L29/739;H01L29/78 主分类号 H01L29/739
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