光学元件之量测方法、电脑可执行记录媒体、系统及设备;METHOD, COMPUTER EXECUTABLE RECORDING MEDIA, SYSTEM AND APPARATUS FOR OPTICAL ELEMENT TESTING

摘要

本发明系一光学元件之量测方法、电脑可执行记录媒体、系统及设备，其执行下列步骤：照射一雷射光线至光学元件，并覆盖该光学元件之全部；连续旋转该光学元件以360度，以取得反射自该光学元件之反射光之一对应于特定旋转角度之特定组数的反射光波前图像；分析该等反射光波前图像之多种像差特征资讯；分别解析出该等像差特征资讯上之复数种干扰因素以对应于该等量测误差；分别计算该等量测误差各自之分类像差特征资讯；分别解析该等分类像差特征资讯，以分别得到该等量测误差的一对应误差量。; rotating 360 degree for the optical component to acquire wavefront picture sets; analyzing aberration feature information sets from the wavefront picture sets; analyzing interference factors from the aberration feature information sets, calculating categorized aberration feature information sets; and analyzing corresponding error amounts from the categorized aberration feature information sets.