发明名称 Method of manufacturing a magnetic recording medium
摘要 A method of manufacturing a magnetic recording medium includes providing a substrate that is a magnetic recording medium substrate having a disc shape, having two main surfaces, and having defined therein a center hole; holding the center hole of the substrate from both main surfaces with two holding members that each have a disc shape to hold the substrate and to cover at least the periphery of the center hole adjacent to the two main surfaces of the substrate; and applying resist liquid simultaneously to both main surfaces of the substrate using spin coating to form a resist layer simultaneously on both main surfaces while maintaining the periphery of the center hole immediately adjacent to the two main surfaces of the substrate resist-free as an unapplied portion. The method enables efficient formation of uniform resist layers without defects on both faces of the substrate.
申请公布号 US9070400(B2) 申请公布日期 2015.06.30
申请号 US201012821104 申请日期 2010.06.22
申请人 FUJI ELECTRIC CO., LTD. 发明人 Hashizume Yuichi;Hibino Kunio
分类号 G11B5/855 主分类号 G11B5/855
代理机构 Rabin & Berdo, P.C. 代理人 Rabin & Berdo, P.C.
主权项 1. A method of manufacturing a magnetic recording medium, comprising the steps of: providing a substrate that is a magnetic recording medium substrate having a disc shape, having two main surfaces, and having defined therein a center hole; supporting the center hole of the substrate from both main surfaces with two holding members so as to hold the substrate in a vertical plane and to cover at least the periphery of the center hole adjacent to the two main surfaces of the substrate, the two holding members each having a circumferential tapered portion that tapers down toward a circumferential perimeter of the substrate, the tapered portions of the holding members being symmetrical with respect to the vertical plane; engaging one of the two holding members with a rotation shaft of a drive portion of a spin coater and detachably mating the two holding members with one another at the rotation shaft, wherein one of the holding members has a lateral protrusion and the other holding member has a depression portion that interlocks with the protrusion to prevent relative rotation of the two holding members, wherein a rotational axis of the holding members passes through the protrusion and the depression; and applying resist liquid simultaneously to both main surfaces of the substrate using spin coating to form a resist layer simultaneously on both main surfaces by directing resist liquid toward the tapered portions of each of the two holding members while maintaining the periphery of the center hole immediately adjacent to the two main surfaces of the substrate substantially resist-free, wherein the applying steps is conducted by directing the resist liquid toward locations on the tapered portions that are substantially equally distant from the rotational axis.
地址 Kawasaki-shi JP