Sliding member and fluid dynamic pressure bearing apparatus

摘要

There is provided a sliding member including: a substrate; and a protective film provided on the substrate, wherein the protective film is composed only of a metal base layer provided on the substrate, a low-hardness diamond-like carbon layer provided as a single layer on the metal base layer, and a high-hardness diamond-like carbon layer provided as a single layer directly on the low-hardness diamond-like carbon layer. The sliding member has the protective film which has excellent frictional wear resistance property and satisfactory adhesion property to the substrate, regardless of having a simple structure.

主权项

1. A sliding member comprising:
a substrate; and a protective film provided on the substrate, the protective film consisting of a metal base layer provided on the substrate, one low-hardness diamond-like carbon layer provided on the metal base layer, and one high-hardness diamond-like carbon layer provided directly on the low-hardness diamond-like carbon layer, wherein the high-hardness diamond-like carbon layer has a homogenous structure within the high-hardness diamond-like carbon layer, the low-hardness diamond-like carbon layer has a columnar structure in which a plurality of streaks extend in a thickness direction of the low-hardness diamond-like carbon layer, and a hardness of the high-hardness diamond-like carbon layer is not less than 28 GPa, and a hardness of the low-hardness diamond-like carbon layer is not more than 17 GPa.