发明名称 Mask having assist pattern
摘要 A mask may include a circuit area and a pixel area. The circuit area includes a circuit pattern. The pixel area includes a pixel pattern which is extended in a length direction and an assist pattern which is at an end portion of the pixel pattern and adjacent to the circuit area.
申请公布号 US9069258(B2) 申请公布日期 2015.06.30
申请号 US201313835567 申请日期 2013.03.15
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 Kim Bong-Yeon;Kang Min;Shim Seung-Bo;Lee Jong-kwang;Ju Jin-Ho;Kim Jeong-Won;Kim Tae-Gyun;Park Chul-Won;Woo Jun-Hyuk;Lee Hyun-Joo
分类号 G03F1/42 主分类号 G03F1/42
代理机构 Cantor Colburn LLP 代理人 Cantor Colburn LLP
主权项 1. A mask comprising: a circuit area comprising a circuit pattern; and a pixel area comprising: a pixel pattern extended in a length direction; andan assist pattern adjacent to the circuit area, the assist pattern connected to and extended from an end portion of the pixel pattern,whereinthe assist pattern connected to and extended from the end portion of the pixel pattern comprises two sub-assist patterns extended from corners of the end portion of the pixel pattern, each of the sub-assist patterns having a square shape.
地址 KR