| 主权项 |
1. A micromachined structure, comprising:
a substrate having a cavity formed thereon, wherein the substrate defines a horizontal direction parallel to a surface thereof; and a suspended structure formed on the cavity of the substrate, the suspended structure comprising
a first metal layer,a second metal layer,a first dielectric layer positioned between the first and second metal layers,a second dielectric layer disposed on the second metal layer,a third metal layer disposed on the second dielectric layer, anda third dielectric layer disposed on the third metal layer, wherein the first dielectric layer has a first opening in communication with the cavity through an opening formed in the first metal layer, the second dielectric layer has a second opening in communication with the first opening through an opening formed in the second metal layer, the third dielectric layer has a third opening in communication with the second opening through an opening formed in the third metal layer, and the second opening has a second width in the horizontal direction, the third opening has a third width in the horizontal direction, and the second width is greater than the third width. |
