System, method and computer program product for defect detection based on multiple references

摘要

A defect detection system for computerized detection of defects, the system including: an interface for receiving inspection image data including information of an analyzed pixel and of a plurality of reference pixels; and a processor, including: a differences analysis module, configured to: (a) calculate differences based on an inspected value representative of the analyzed pixel and on multiple reference values, each of which is representative of a reference pixel among the plurality of reference pixels; wherein the differences analysis module is configured to calculate for each of the reference pixels a difference between the reference value of the reference pixel and the inspected value; and (b) compute a representative difference value based on a plurality of the differences; and a defect analysis module, configured to determine a presence of a defect in the analyzed pixel based on the representative difference value.

主权项

1. A defect detection system for computerized detection of defects in an inspected object based on processing of an inspection image, the system comprising:
an interface for receiving inspection image data including information of an analyzed pixel and of a plurality of reference pixels; a memory; and a processor operatively coupled to the interface and the memory to:
identify an analyzed pixel from a first cell of the inspection image of the inspected object;identify a plurality of reference pixels from a plurality of cells of the inspection image of the inspected object, the plurality of cells being other cells in the inspection image than the first cell of the inspection image;obtain an inspected value representative of the analyzed pixel of the first cell of the inspected image, and a plurality of reference values of the plurality of cells of the inspection image, wherein each of the plurality of reference values is representative of a reference pixel among the plurality of reference pixels from the plurality of cells other than the first cell;for each of the plurality of reference pixels, calculate a difference between the reference value of a respective reference pixel and the inspected value of the analyzed pixel of the first cell;compute a representative difference value based on a plurality of the differences; and determine a presence of a defect in the analyzed pixel based on the representative difference value.