| 发明名称 | Functional element, sensor element, electronic apparatus, and method for producing a functional element | ||
| 摘要 | A functional element including a substrate having a principal surface, a groove portion (a first groove portion, a second groove portion) disposed on the principal surface, and a fixed electrode section (a first fixed electrode finger, a second fixed electrode finger) laid across the groove portion on the substrate, wherein, in the groove portion, a raised portion formed by using at least one of the substrate and the fixed electrode section is provided in a position overlapping with the fixed electrode section in a plan view, the raised portion has a bonded surface (an end face), a wiring line (a first wiring line, a second wiring line) is disposed on the bonded surface, and the substrate and the fixed electrode section are connected with the wiring line sandwiched between the substrate and the fixed electrode section. | ||
| 申请公布号 | US9068835(B2) | 申请公布日期 | 2015.06.30 |
| 申请号 | US201213449619 | 申请日期 | 2012.04.18 |
| 申请人 | Seiko Epson Corporation | 发明人 | Yoda Mitsuhiro;Kawano Shuichi;Takagi Shigekazu;Yamazaki Seiji |
| 分类号 | H05K1/11;G01C19/5783;G01P15/08;G01P15/125 | 主分类号 | H05K1/11 |
| 代理机构 | Harness, Dickey & Pierce, P.L.C. | 代理人 | Harness, Dickey & Pierce, P.L.C. |
| 主权项 | 1. A functional element comprising: a substrate having a principal surface on which a groove portion is provided, the groove portion in which a wiring line is provided; and a fixed electrode section laid across the groove portion on the substrate, wherein in a connection between the fixed electrode section and the wiring line, a raised portion formed by using at least one of the substrate and the fixed electrode section is disposed, the raised portion is formed integrally with the substrate, and an end face of the raised portion is flush with the principal surface of the substrate. | ||
| 地址 | JP | ||