Double-axial, shock-resistant rotation rate sensor with nested, linearly oscillating seismic elements

摘要

A micromechanical rotation rate sensor, including a substrate whose base surface is aligned parallel to the x-y plane of a Cartesian coordinate system, with the rotation rate sensor having at least one first seismic mass and a second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor being designed such that it can detect rotation rates about at least two mutually essentially orthogonal sensitive axes, wherein at least the second seismic mass is in the form of a frame which at least partially surrounds the first seismic mass with respect to the position on the x-y plane.

主权项

1. A micromechanical rotation rate sensor, comprising a substrate whose base surface is aligned parallel to a plane comprising an x-axis and a y-axis, with the rotation rate sensor having at least one first seismic mass and a second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor configured to detect rotation rates about at least two mutually essentially orthogonal sensitive axes, wherein
at least the second seismic mass is in the form of a frame which at least partially surrounds the first seismic mass with respect to the position on the plane, wherein the first and second seismic masses are coupled to one another by at least one first and one second coupling device that comprises at least one essentially rigid coupling beam and at least one torsion spring for allowing rotational deflection about one or two axes and for suppressing further rotational deflections and all translational deflections of the least one essentially rigid coupling beam coupling beam.