发明名称 ACTUATOR OF MICRO-ELECTROMECHANICAL TYPE FOR MOVING A RIGID ELEMENT
摘要 The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as a mirror (1), the element being mechanically coupled to a frame with a bendable coupling, wherein actuator elements (3A, 3B) are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.
申请公布号 EA021493(B1) 申请公布日期 2015.06.30
申请号 EA20120090157 申请日期 2010.09.16
申请人 SINTEF 发明人 BAKKE THOR;JOHANSEN IB-RUNE;VOGL ANDREAS;TYHOLDT FRODE;WANG DAG, THORSTEIN
分类号 G02B26/00;G02B5/28 主分类号 G02B26/00
代理机构 代理人
主权项
地址