| 发明名称 | Method of optical fabrication of three-dimensional polymeric structures with out of plane profile control | ||
| 摘要 | A method of optical fabrication comprises coating a substrate with a photocuring material, controlling the application of light to the photocuring material so as to control the intensity and pattern of the light both in-plane and out of plane, and developing the photocuring material. | ||
| 申请公布号 | US9069256(B2) | 申请公布日期 | 2015.06.30 |
| 申请号 | US201213469364 | 申请日期 | 2012.05.11 |
| 申请人 | Carnegie Mellon University | 发明人 | Cheng Chao-Min;Li Bin;LeDuc Philip Ray |
| 分类号 | G03F7/20;G03F7/38 | 主分类号 | G03F7/20 |
| 代理机构 | Jones Day | 代理人 | Jones Day |
| 主权项 | 1. A method of optical fabrication, comprising: coating a substrate with a photocuring material; controlling the application of light to the photocuring material so as to simultaneously control the intensity and pattern of the light both in-plane and out of plane by moving a stage or a lens in an X direction, a Y direction, and a Z direction, wherein the intensity and pattern of the light are applied using a first light beam and a second light beam, wherein the first light beam and the second light beam are applied at a point to positively or negatively interfere to apply the intensity and pattern of the light; heating certain structures to cause thermal reflow; and developing the photocuring material. | ||
| 地址 | Pittsburgh PA US | ||