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发明名称
ETCHING MATERIAL
摘要
붕소 및 그 붕소와 결합된 할로겐을 구조 중에 포함하는 루이스산, 상기 루이스산의 염, 및 상기 루이스산을 발생하는 화합물로부터 선택되는 적어도 1개의 붕소 화합물을 함유하는 에칭재.
申请公布号
KR20150073163(A)
申请公布日期
2015.06.30
申请号
KR20157007145
申请日期
2013.10.11
申请人
HITACHI CHEMICAL COMPANY, LTD.
发明人
NAKAKO HIDEO;KUMASHIRO YASUSHI;NOUDOU TAKAAKI;INADA MAKI;KURODA KYOKO
分类号
C09K13/10;H01L21/308
主分类号
C09K13/10
代理机构
代理人
主权项
地址
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