Method for fabricating optical micro structure and applications thereof

摘要

A method for fabricating an image sensor, wherein the method comprises steps as follows: Firstly, a transparent substrate is formed on a working substrate. Pluralities of micro lens are formed in the transparent substrate, wherein the lenses have a refraction ratio differing from that of the transparent substrate. Subsequently, a color filter is formed on the lenses. Afterward, the color filter is engaged with an image sensing device by flipping around the working substrate.

主权项

1. A method for fabricating an image sensor, comprising:
forming a transparent substrate on a working substrate; forming a plurality of lenses in the transparent substrate, wherein each lens is a micro lens, and the lenses have a refraction ratio differing from that of the transparent substrate; forming a color filter on the lenses; flipping the working substrate over so as to engage the color filter with an image sensing device; and planarizing the working substrate, whereby the remaining working substrate serves as a passive layer to protect the color filter, after the color filter is engaged with the image sensing device.